Gemini-晶粒分析系统
Gemini-Grain Analysis System-A new characterization tool for the investigation of the crystal structure of directionally solidified crystalline silicon.
Gemini-晶粒分析系统-一种研究定向铸造多晶硅晶体结构的新工具
(经Fraunhofer认定为有效分析工具)
Application应用: Optimize your crystallization process by Grain structure of Multi-and Mono-like as-cut wafer
通过得到多晶或类单晶原始硅片的晶粒结构来优化多晶硅结晶工艺
-Number of grains and size of each grain晶粒的数量及每个晶粒的大小
-Overall length of grain boundaries晶界总长度
-Recognition of twin grains辨认双晶
-Percentage of area of largest grain最大晶粒的面积比例
Example1): Reliable grain detection by use of 20 different illumination directions.
从20个不同的方向照射检测晶粒特性
Example2): Qualify easily according to size of largest grain: mono area persentage of mono-like wafers
通过最大晶粒的大小判断硅片质量:类单晶硅片中单晶的面积比例
Benefit from Gemini:
* Indicates ingot regions of lower crystalline quality, for example regions of equiaxed growth of very small grains.
指出多晶硅锭中质量低下的区域,比如非常细小的等轴晶的生长区域
* Characterisation of different multi-crystalline silicon ingots.
比较不同多晶硅锭的特性
* Monitor the impact of modification of the cystallisation process parameters on the grain sizes distribution.
监控结晶工艺参数的改变对晶粒大小的影响
* Give a first qualitative impression of the multi-crystalline ingots and wafers.
预先判断多晶硅锭和硅片的质量
* Potantial application: work with orientation analysis
潜在应用:配合作晶向分析